AMC and LAM Spare Parts As Follows:

1. Provide P5000 Spare Parts including chamber, showerhead, ESC, susceptor, shadow ring, cover, etc. Products cover CVD process and ETCH process, from Mark2 to MXP + cavity.

2. Provide WJ999/WJ999R/WJ1000 machine N2 shield, belt, injector, housing and other complete series of consumables.

3. Provide spare parts needed in chamber of Endura 5500, Centure 5200, DPS, etc.

4. Provide spare parts for LAM9600, LAM9400 and LAM4xxx.

5. Provide FORK and other spare parts on NOVELLUS C1/C2.


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